![shallow trench isolation oxide thickness leakage](https://host.easylife.tw/files/RiotIsolator.png)
由NRezzak著作·2010·被引用8次—Priortoradiationexposure,theleakagecurrentoftheparasiticdevicesislowduetotherelativelylargeeffectivegateoxidethickness(highthreshold ...,由VPGopinath著作·2001·被引用3次—Shallowtrenchlineroxidationschemeisshowntohavedi...
Gate length dependence of the shallow trench isolation ...
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由LZhangli著作·2011·被引用5次—Gatelengthdependenceoftheshallowtrenchisolationleakagecurrentinan...STIwasintroducedandthetrenchoxidethicknessisabout390nm.Thegate ...
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